Before wire-bonded the gold wires on the finger, the assembly factory needs to apply molding plasma to clean the surface of the substrate to avoid the delamination between the die attach film and the die surface.
The ECR setting is used to etch and deposited some ions for better adhesion. The use in research become widespread in the last two decades. It supports plasma waves to be generated remotely from tool surfaces.
沒有留言:
張貼留言